Inventor
MATSUNO DAISUKE
JP6 patents
Patents
6 patentsUS7642879B2Jan 5, 2010
Impedance matching apparatus
DAIHEN CORP121 citations97
US7332981B2Feb 19, 2008
Impedance matching apparatus for a plasma chamber comprising two separate storage units and three separate calculators
DAIHEN CORP169 citations97
US7199678B2Apr 3, 2007
Impedance matching apparatus for a plasma chamber comprising two separate storage units and calculators
DAIHEN CORP67 citations96
US6621372B2Sep 16, 2003
Impedance matching device
DAIHEN CORP60 citations95
US5760544AJun 2, 1998
Magnetron microwave generator with filament-life diagnostic circuit
DAIHEN CORP9 citations70
US9300271B2Mar 29, 2016
Impedance matching device
DAIHEN CORP2 citations61