P

Inventor

HEO DONGHO

US7 patents
⚠️ This page may combine multiple inventors who share the name “HEO DONGHO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

4 patents
US7309646B1Dec 18, 2007

De-fluoridation process

LAM RES CORP25 citations92
US7910489B2Mar 22, 2011

Infinitely selective photoresist mask etch

LAM RES CORP16 citations83
US7838426B2Nov 23, 2010

Mask trimming

LAM RES CORP9 citations82
US7785484B2Aug 31, 2010

Mask trimming with ARL etch

LAM RES CORP7 citations72

HEO DONGHO

2 patents
US8172948B2May 8, 2012

De-fluoridation process

HEO DONGHO9 citations82
US8277670B2Oct 2, 2012

Plasma process with photoresist mask pretreatment

HEO DONGHO19 citations81

GOYAL SUPRIYA

1 patent
US8864931B2Oct 21, 2014

Mask trimming

GOYAL SUPRIYA2 citations55