Inventor

HENDRIKS STEFAN GERTRUD MARIE

NL2 patents

Patents

2 patents

US6977461B2Dec 20, 2005

System and method for moving an object employing piezo actuators

ASML NETHERLANDS BV24 citations87

US7999912B2Aug 16, 2011

Lithographic apparatus and sensor calibration method

ASML NETHERLANDS BV7 citations81