Inventor

SCHIJVENAARS LODEWIJK ALEXANDER

NL2 patents

Patents

2 patents

US7999912B2Aug 16, 2011

Lithographic apparatus and sensor calibration method

ASML NETHERLANDS BV7 citations81

US12474632B2Nov 18, 2025

Pellicle frame for EUV lithography

ASML NETHERLANDS BV0 citations50