Inventor

HAYAKAWA HIROFUMI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “HAYAKAWA HIROFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANTEST CORP

2 patents

US7394640B2Jul 1, 2008

Electrostatic chuck and substrate fixing method using the same

ADVANTEST CORP12 citations79

US8859993B2Oct 14, 2014

Sample holder of electron beam exposure apparatus and electron beam exposure method using the same

ADVANTEST CORP0 citations48

SONY CORP

1 patent

US7321685B2Jan 22, 2008

Image processing device, image processing method, and image capturing device

SONY CORP35 citations90

WAKAZONO MASAFUMI

1 patent

US8223410B2Jul 17, 2012

Imaging device and method of processing imaging result in imaging device

WAKAZONO MASAFUMI13 citations82