Inventor
NISHIO HIDETOSHI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “NISHIO HIDETOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
3 patentsUS5567661AOct 22, 1996
Formation of planarized insulating film by plasma-enhanced CVD of organic silicon compound
FUJITSU LTD37 citations86
US5506443AApr 9, 1996
Multilayer insulating film of semiconductor device and method for forming the film
FUJITSU LTD15 citations81
US5763005AJun 9, 1998
Method for forming multilayer insulating film of semiconductor device
FUJITSU LTD2 citations61