Inventor
CHANG WEN TEH
US3 patents
Patents
3 patentsUS7398693B2Jul 15, 2008
Adaptive control method for rapid thermal processing of a substrate
APPLIED MATERIALS INC19 citations91
US9305748B2Apr 5, 2016
Method of matching two or more plasma reactors
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US9184021B2Nov 10, 2015
Predictive method of matching two plasma reactors
APPLIED MATERIALS INC0 citations35