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Inventor

KHAN ANISUL H

US9 patents
⚠️ This page may combine multiple inventors who share the name “KHAN ANISUL H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

5 patents
US6897155B2May 24, 2005

Method for etching high-aspect-ratio features

APPLIED MATERIALS INC11 citations71
US6905616B2Jun 14, 2005

Method of releasing devices from a substrate

APPLIED MATERIALS INC4 citations60
US8937021B2Jan 20, 2015

Methods for forming three dimensional NAND structures atop a substrate

APPLIED MATERIALS INC2 citations59
US9305748B2Apr 5, 2016

Method of matching two or more plasma reactors

APPLIED MATERIALS INC0 citations35
US9184021B2Nov 10, 2015

Predictive method of matching two plasma reactors

APPLIED MATERIALS INC0 citations35

HAN JOO WON

1 patent
US8932947B1Jan 13, 2015

Methods for forming a round bottom silicon trench recess for semiconductor applications

HAN JOO WON98 citations91

(unassigned)

1 patent
US6759340B2Jul 6, 2004

Method of etching a trench in a silicon-on-insulator (SOI) structure

45 citations91

SRINIVASAN SUNIL

1 patent
US8747684B2Jun 10, 2014

Multi-film stack etching with polymer passivation of an overlying etched layer

SRINIVASAN SUNIL1 citations45

FOVELL RICHARD

1 patent
US8596336B2Dec 3, 2013

Substrate support temperature control

FOVELL RICHARD1 citations41