Inventor
HE ZUOPENG
CN5 patents
Patents
5 patentsUS9754893B2Sep 5, 2017
Semiconductor structure and fabrication method thereof
SEMICONDUCTOR MFG INT SHANGHAI CORP7 citations77
US11538686B2Dec 27, 2022
Semiconductor structure and method for forming the same
SEMICONDUCTOR MFG INT SHANGHAI CORP2 citations67
US11373949B2Jun 28, 2022
Interconnect structure having metal layers enclosing a dielectric
SEMICONDUCTOR MFG INT SHANGHAI CORP0 citations56
US9607895B2Mar 28, 2017
Silicon via with amorphous silicon layer and fabrication method thereof
SEMICONDUCTOR MFG INT SHANGHAI CORP0 citations48
US10553536B2Feb 4, 2020
Method of manufacturing an interconnect structure by forming metal layers in mask openings
SEMICONDUCTOR MFG INT SHANGHAI CORP0 citations46