Inventor
TOMINAGA SHO
JP9 patents
Patents
9 patentsUS10707090B2Jul 7, 2020
Plasma etching method
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US10381237B2Aug 13, 2019
Etching method
TOKYO ELECTRON LTD39 citations92
US9997374B2Jun 12, 2018
Etching method
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US9666446B2May 30, 2017
Etching method
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US9966273B2May 8, 2018
Plasma etching method
TOKYO ELECTRON LTD3 citations71
US9779961B2Oct 3, 2017
Etching method
TOKYO ELECTRON LTD4 citations69
US11404281B2Aug 2, 2022
Method of etching silicon containing films selectively against each other
TOKYO ELECTRON LTD0 citations60
US10903084B2Jan 26, 2021
Method of etching silicon containing films selectively against each other
TOKYO ELECTRON LTD0 citations60
US10304691B2May 28, 2019
Method of etching silicon oxide and silicon nitride selectively against each other
TOKYO ELECTRON LTD0 citations50