Inventor
JALICS CHRISTOF
DE5 patents
⚠️ This page may combine multiple inventors who share the name “JALICS CHRISTOF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
3 patentsUS11099484B2Aug 24, 2021
Method for repairing reflective optical elements for EUV lithography
ZEISS CARL SMT GMBH0 citations59
US10649340B2May 12, 2020
Reflective optical element for EUV lithography
ZEISS CARL SMT GMBH1 citations59
US12111578B2Oct 8, 2024
Mirror for an illumination optical unit of a projection exposure apparatus comprising a spectral filter in the form of a grating structure and method for producing a spectral filter in the form of a grating structure on a mirror
ZEISS CARL SMT GMBH0 citations54