Inventor
YABU Shuhei
JP6 patents
Patents
6 patentsUS11348757B2May 31, 2022
Charged particle beam device
HITACHI HIGH TECH CORP2 citations71
US11348758B2May 31, 2022
Charged particle beam device
HITACHI HIGH TECH CORP2 citations66
US10910194B2Feb 2, 2021
Charged particle beam device and optical-axis adjusting method thereof
HITACHI HIGH TECH CORP0 citations56
US11404237B2Aug 2, 2022
Charged particle beam device
HITACHI HIGH TECH CORP0 citations52
US10573489B2Feb 25, 2020
Charged particle beam device and optical-axis adjusting method thereof
HITACHI HIGH TECH CORP0 citations46
US10008361B2Jun 26, 2018
Charged particle beam device and installation method
HITACHI HIGH TECH CORP0 citations46