Inventor

ASAMAKI TATSUO

JP3 patents

Patents

3 patents

US4950956AAug 21, 1990

Plasma processing apparatus

ANELVA CORP71 citations94

US4638209AJan 20, 1987

Ion beam generating apparatus

ANELVA CORP56 citations94

US4919783AApr 24, 1990

Apparatus for processing an object by gas plasma with a reduced damage

ANELVA CORP30 citations90