Inventor

OKAMOTO YOSHIHIKO

JP63 patents

⚠️ This page may combine multiple inventors who share the name “OKAMOTO YOSHIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OKAMOTO YOSHIHIKO

HITACHI LTD

Mask for manufacturing semiconductor device and method of manufacture thereof

Mask for manufacturing semiconductor devices and method of manufacture thereof

Method of forming light beam and method of fabricating semiconductor integrated circuits

Process for manufacturing semiconductor integrated circuit device, exposure method and mask for the process

Process for manufacturing a multi-chip module

Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process

Method of forming light beam, apparatus therefor, method of measuring sizes using the same, method of inspecting appearance, method of measuring height, method of exposure, and method of fabricating semiconductor integrated circuits

Semiconductor IC device fabricating method

Exposure method, aligner, and method of manufacturing semiconductor integrated circuit devices

Semiconductor IC device fabricating method

Exposure method, phase shift mask used in the same, and process of fabricating semiconductor integrated circuit device using the same

Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process

Photomask manufacturing process and semiconductor integrated circuit device manufacturing process using the photomask

Exposure method and pattern data preparation system therefor, pattern data preparation method and mask as well as exposure apparatus

Exposure method and pattern data preparation system therefor, pattern data preparation method and mask as well as exposure apparatus

Mask for manufacturing semiconductor device and method of manufacture thereof

Mask for manufacturing semiconductor device and method of manufacture thereof

Mask for manufacturing semiconductor device and method of manufacture thereof

Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process

Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process

Mask for manufacturing semiconductor device and method of manufacture thereof

Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process

Mask for manufacturing semiconductor device and method of manufacture thereof

Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process

Mask for manufacturing semiconductor device and method of manufacture thereof

Mask for manufacturing semiconductor device and method of manufacture thereof

Exposure method, aligner, and method of manufacturing semiconductor integrated circuit devices

Mask for manufacturing semiconductor device and method of manufacture thereof

Exposure method, aligner, and method manufacturing semiconductor integrated circuit devices

Mask for manufacturing semiconductor device and method of manufacture thereof

Mask for manufacturing semiconductor device and method of manufacture thereof

Process for manufacturing semiconductor integrated circuit device, exposure method and mask for the process

Mask for manufacturing semiconductor device and method of manufacture thereof

Charged particle beam lithography system and method therefor

Method of manufacturing photomask, photomask, and method of manufacturing semiconductor integrated circuit device

Mask for manufacturing semiconductor device and method of manufacture thereof

FUJI PHOTO FILM CO LTD

Image scanning system

Device for controlling radiation image information read out gain

Cathode-ray tube image recording device

Radiation image read-out and reproducing apparatus

Thermal development of imaged light-sensitive recording material using microwaves

Device for thermally recording a cathode-ray tube image

Radiation image read-out and reproducing apparatus

RENESAS TECH CORP

Semiconductor integrated circuit device fabrication method using a mask having a phase shifting film covering region and an opening region

Process for fabricating semiconductor integrated circuit device, and exposing system and mask inspecting method to be used in the process

Mask for manufacturing semiconductor device and method of manufacture thereof

CANON KK

Power supply apparatus and control method thereof

Power transmission apparatus wirelessly transmitting power to power receiving apparatus

Power supply apparatus capable of supplying power to multiple power receiving apparatuses, control method thereof, and storage medium

TOKYO ELECTRON LTD

Method of forming doped film