Inventor

NEZU MOTOI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “NEZU MOTOI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO SEIMITSU CO LTD

2 patents

US7521384B2Apr 21, 2009

Method and apparatus for peeling surface protective film

TOKYO SEIMITSU CO LTD7 citations70

US7601615B2Oct 13, 2009

Method of grinding back surface of semiconductor wafer and semiconductor wafer grinding apparatus

TOKYO SEIMITSU CO LTD5 citations59

SPEEDFAM CO LTD

1 patent

US6039638AMar 21, 2000

Work planarizing method and apparatus

SPEEDFAM CO LTD11 citations70