Inventor

GRANDY MICHAEL

DE2 patents

⚠️ This page may combine multiple inventors who share the name “GRANDY MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STEAG RTP SYSTEMS GMBH

1 patent

US6953338B2Oct 11, 2005

Device for thermal treatment of substrates

STEAG RTP SYSTEMS GMBH23 citations86

GRAF OTTMAR

1 patent

US7746482B2Jun 29, 2010

Determining the position of a semiconductor substrate on a rotation device

GRAF OTTMAR2 citations53