Inventor

YAMAGUCHI KATSUMASA

JP23 patents

⚠️ This page may combine multiple inventors who share the name “YAMAGUCHI KATSUMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

YAMAGUCHI KATSUMASA

TOKYO ELECTRON LTD

Tungsten film-forming method, film-forming system and storage medium

Film forming method and film forming system

Film forming method and substrate processing system

Tungsten film-forming method, film-forming system and storage medium

Gas supply method and film forming method

Deposition method and deposition apparatus

Deposition method and deposition apparatus

Gas supply device, gas supply method and film forming method

Film forming method

Tungsten film forming method, film forming system and film forming apparatus

Method of forming film

Method of processing substrate

Method of filling recesses in substrate with tungsten

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

Folding device and electronic equipment using the same

Apparatus for processing multiple workpieces utilizing a single laser beam source

Electronic device

Camera-equipped portable device

Apparatus for controlling relation in position between a photomask and a wafer

Opening and closing device and electronic equipment using the same

Alignment apparatus including three beams and three gratings

MITSUBISHI STEEL MFG

Rotating mechanism of biaxial hinge and portable telephone with the same

TANIGUCHI KOJI

Portable terminal apparatus

PANASONIC CORP

Electronic device, input device, and portable electronic device using the same