Inventor

TAKEYAMA KOICHI

JP3 patents

Patents

3 patents

US7473866B2Jan 6, 2009

Laser processing apparatus

DISCO CORP124 citations96

US7557904B2Jul 7, 2009

Wafer holding mechanism

DISCO CORP12 citations83

US7408129B2Aug 5, 2008

Laser beam machine with cylindrical lens system

DISCO CORP8 citations72