P

Inventor

SIERADZKI MANNY

US11 patents
⚠️ This page may combine multiple inventors who share the name “SIERADZKI MANNY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AXCELIS TECH INC

5 patents
US7059817B2Jun 13, 2006

Wafer handling apparatus and method

AXCELIS TECH INC23 citations92
US7842931B2Nov 30, 2010

Extraction electrode manipulator

AXCELIS TECH INC8 citations78
US7705328B2Apr 27, 2010

Broad ribbon beam ion implanter architecture with high mass-energy capability

AXCELIS TECH INC2 citations62
US7586111B2Sep 8, 2009

Ion implanter having combined hybrid and double mechanical scan architecture

AXCELIS TECH INC5 citations61
US7858955B2Dec 28, 2010

System and method of controlling broad beam uniformity

AXCELIS TECH INC0 citations51

DIAMOND SEMICONDUCTOR GROUP

3 patents
US5350926ASep 27, 1994

Compact high current broad beam ion implanter

DIAMOND SEMICONDUCTOR GROUP195 citations98
US5834786ANov 10, 1998

High current ribbon beam ion implanter

DIAMOND SEMICONDUCTOR GROUP136 citations96
US5486080AJan 23, 1996

High speed movement of workpieces in vacuum processing

DIAMOND SEMICONDUCTOR GROUP118 citations96

VARIAN SEMICONDUCTOR EQUIPMENT

2 patents
US8809803B2Aug 19, 2014

Inductively coupled plasma ion source with multiple antennas for wide ion beam

VARIAN SEMICONDUCTOR EQUIPMENT2 citations62
US9269536B2Feb 23, 2016

Double ended electrode manipulator

VARIAN SEMICONDUCTOR EQUIPMENT0 citations50

SIERADZKI MANNY

1 patent
US8124947B2Feb 28, 2012

Ion implanter having combined hybrid and double mechanical scan architecture

SIERADZKI MANNY2 citations55