Inventor

PATEL SHARDUL

US7 patents

⚠️ This page may combine multiple inventors who share the name “PATEL SHARDUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BENVENISTE VICTOR

2 patents

US8188448B2May 29, 2012

Temperature controlled ion source

BENVENISTE VICTOR8 citations81

US8183542B2May 22, 2012

Temperature controlled ion source

BENVENISTE VICTOR2 citations60

APPLIED MATERIALS INC

2 patents

US11149345B2Oct 19, 2021

Cryogenically cooled rotatable electrostatic chuck

APPLIED MATERIALS INC1 citations61

US12191113B2Jan 7, 2025

Systems and methods for optimizing full horizontal scanned beam distance

APPLIED MATERIALS INC0 citations45

SINCLAIR FRANK

1 patent

US8436318B2May 7, 2013

Apparatus for controlling the temperature of an RF ion source window

SINCLAIR FRANK16 citations83

VARIAN SEMICONDUCTOR EQUIPMENT

1 patent

US8003956B2Aug 23, 2011

Method and apparatus for controlling beam current uniformity in an ion implanter

VARIAN SEMICONDUCTOR EQUIPMENT3 citations60

NAUMOVSKI OLIVER V

1 patent

US8907295B2Dec 9, 2014

Hybrid electrostatic lens with increased natural frequency

NAUMOVSKI OLIVER V1 citations36