Inventor
KIM HO-CHUL
KR9 patents
⚠️ This page may combine multiple inventors who share the name “KIM HO-CHUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
7 patentsUS7855037B2Dec 21, 2010
Photomask having a test pattern that includes separate features for different printed critical dimensions to correlate magnitude and direction of defocus
SAMSUNG ELECTRONICS CO LTD17 citations90
US7642019B2Jan 5, 2010
Methods for monitoring and adjusting focus variation in a photolithographic process using test features printed from photomask test pattern images; and machine readable program storage device having instructions therefore
SAMSUNG ELECTRONICS CO LTD21 citations90
US6900887B2May 31, 2005
Method and system for measuring stray light
SAMSUNG ELECTRONICS CO LTD15 citations82
US7384711B2Jun 10, 2008
Stencil mask having main and auxiliary strut and method of forming the same
SAMSUNG ELECTRONICS CO LTD5 citations72
US7903530B2Mar 8, 2011
Optical system for spatially controlling light polarization and method for manufacturing the same
SAMSUNG ELECTRONICS CO LTD3 citations60
US6913858B2Jul 5, 2005
Photomask for measuring lens aberration, method of manufacturing the same, and method of measuring lens aberration
SAMSUNG ELECTRONICS CO LTD5 citations60
US7635547B2Dec 22, 2009
Stencil mask having main and auxiliary strut and method of forming the same
SAMSUNG ELECTRONICS CO LTD0 citations51