Inventor
PEDERSON TERRY
US4 patents
Patents
4 patentsUS9324598B2Apr 26, 2016
Substrate processing system and method
INTEVAC INC7 citations82
US10679883B2Jun 9, 2020
Wafer plate and mask arrangement for substrate fabrication
INTEVAC INC10 citations77
US9875922B2Jan 23, 2018
Substrate processing system and method
INTEVAC INC3 citations71
US10418260B2Sep 17, 2019
In line fan out system
INTEVAC INC0 citations37