Inventor
COOKE RICHARD A
US13 patents
⚠️ This page may combine multiple inventors who share the name “COOKE RICHARD A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
8 patentsUS10395963B2Aug 27, 2019
Electrostatic chuck
ENTEGRIS INC282 citations98
US8861170B2Oct 14, 2014
Electrostatic chuck with photo-patternable soft protrusion contact surface
ENTEGRIS INC10 citations82
US9721821B2Aug 1, 2017
Electrostatic chuck with photo-patternable soft protrusion contact surface
ENTEGRIS INC2 citations71
US10497598B2Dec 3, 2019
Electrostatic chuck and method of making same
ENTEGRIS INC4 citations70
US12084778B2Sep 10, 2024
Coatings for enhancement of properties and performance of substrate articles and apparatus
ENTEGRIS INC0 citations61
US12018382B2Jun 25, 2024
Coatings for enhancement of properties and performance of substrate articles and apparatus
ENTEGRIS INC0 citations61
US10175133B2Jan 8, 2019
Sensor with protective layer
ENTEGRIS INC0 citations51
US10734270B2Aug 4, 2020
Vacuum chuck with polymeric embossments
ENTEGRIS INC0 citations33