P

Inventor

HUANG SHUOGANG

US6 patents
⚠️ This page may combine multiple inventors who share the name “HUANG SHUOGANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

3 patents
US9953843B2Apr 24, 2018

Chamber for patterning non-volatile metals

LAM RES CORP15 citations82
US9570320B2Feb 14, 2017

Method to etch copper barrier film

LAM RES CORP3 citations72
US12205793B2Jan 21, 2025

Method and apparatus for anisotropic pattern etching and treatment

LAM RES CORP0 citations48

ADHIPRAKASHA EDWIN

1 patent
US8632690B2Jan 21, 2014

Method and apparatus for preventing native oxide regrowth

ADHIPRAKASHA EDWIN2 citations57

HUANG SHUOGANG

1 patent
US8716145B2May 6, 2014

Critical concentration in etching doped poly silicon with HF/HNO3

HUANG SHUOGANG2 citations52

INTERMOLECULAR INC

1 patent
US9373518B2Jun 21, 2016

Method and apparatus for preventing native oxide regrowth

INTERMOLECULAR INC0 citations48