Inventor
YPMA KEITH E
US6 patents
Patents
6 patentsUS9748128B1Aug 29, 2017
Systems and methods for wafer alignment
MICRON TECHNOLOGY INC29 citations91
US10062595B2Aug 28, 2018
Systems and methods for wafer alignment
MICRON TECHNOLOGY INC4 citations81
US9754895B1Sep 5, 2017
Methods of forming semiconductor devices including determining misregistration between semiconductor levels and related apparatuses
MICRON TECHNOLOGY INC8 citations77
US10347519B2Jul 9, 2019
Systems and methods for wafer alignment
MICRON TECHNOLOGY INC2 citations70
US10242901B2Mar 26, 2019
Systems and methods for wafer alignment
MICRON TECHNOLOGY INC3 citations70
US10600667B2Mar 24, 2020
Systems and methods for wafer alignment
MICRON TECHNOLOGY INC0 citations49