Inventor
MIYADATE TAKAHARU
JP4 patents
Patents
4 patentsUS11404249B2Aug 2, 2022
Substrate processing apparatus
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US12261028B2Mar 25, 2025
Plasma processing apparatus
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US11264267B2Mar 1, 2022
Apparatus for processing substrate and method for detecting a presence of a focus ring on a stage
TOKYO ELECTRON LTD0 citations46
US10763087B2Sep 1, 2020
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations36