Inventor
MICHEL DIETER
DE27 patents
⚠️ This page may combine multiple inventors who share the name “MICHEL DIETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HEIDENHAIN GMBH DR JOHANNES
25 patentsUS5631736AMay 20, 1997
Absolute interferometer measuring process and apparatus having a measuring interferometer, control interferometer and tunable laser
HEIDENHAIN GMBH DR JOHANNES103 citations97
US5396328AMar 7, 1995
Waveguide type displacement interferometer having two reference paths
HEIDENHAIN GMBH DR JOHANNES114 citations96
US6605828B1Aug 12, 2003
Optoelectronic component with a space kept free from underfiller
HEIDENHAIN GMBH DR JOHANNES61 citations94
US6885457B1Apr 26, 2005
Rotary position measuring system
HEIDENHAIN GMBH DR JOHANNES33 citations93
US5880882AMar 9, 1999
Scale and method for making a scale
HEIDENHAIN GMBH DR JOHANNES24 citations92
US5333048AJul 26, 1994
Polarizing interferometric displacement measuring arrangement
HEIDENHAIN GMBH DR JOHANNES39 citations92
US5079418AJan 7, 1992
Position measuring apparatus with reflection
HEIDENHAIN GMBH DR JOHANNES24 citations92
US4677293AJun 30, 1987
Photoelectric measuring system
HEIDENHAIN GMBH DR JOHANNES26 citations92
US5760959AJun 2, 1998
Interferential position measuring device with three detectors
HEIDENHAIN GMBH DR JOHANNES17 citations84
US4778273AOct 18, 1988
Photoelectric measuring system
HEIDENHAIN GMBH DR JOHANNES23 citations82
US6621104B1Sep 16, 2003
Integrated optoelectronic thin-film sensor and method of producing same
HEIDENHAIN GMBH DR JOHANNES12 citations74
US5559599ASep 24, 1996
Graduation scale having a continuous planar surface with a protective diffusion barrier layer thereon
HEIDENHAIN GMBH DR JOHANNES10 citations74
US5162869ANov 10, 1992
Apparatus and method having at least one waveguide coupler to create at least two signals having a mutual phase shift not equal to 180 degrees
HEIDENHAIN GMBH DR JOHANNES9 citations74
US5113066AMay 12, 1992
Integrated optical sensor arrangement with detecting means, and means for controlling the optical emission wavelength of the light beam source
HEIDENHAIN GMBH DR JOHANNES13 citations74
US5061073AOct 29, 1991
Photoelectric position measuring arrangement
HEIDENHAIN GMBH DR JOHANNES18 citations74
US4988864AJan 29, 1991
Photoelectric angle measuring device with adjacent order interference
HEIDENHAIN GMBH DR JOHANNES8 citations74
US4955718ASep 11, 1990
Photoelectric measuring system with integrated optical circuit including and illuminating system
HEIDENHAIN GMBH DR JOHANNES18 citations74
US4766310AAug 23, 1988
Photoelectric position measuring instrument with grids
HEIDENHAIN GMBH DR JOHANNES14 citations74
US4155647AMay 22, 1979
Optical apparatus for ballistic measurements
HEIDENHAIN GMBH DR JOHANNES12 citations74
US4923300AMay 8, 1990
Defraction photoelectric position measuring system
HEIDENHAIN GMBH DR JOHANNES11 citations73
US4843237AJun 27, 1989
Photoelectric length and angle measuring device
HEIDENHAIN GMBH DR JOHANNES5 citations63
US4512083AApr 23, 1985
Measuring apparatus
HEIDENHAIN GMBH DR JOHANNES5 citations63
US4505580AMar 19, 1985
Method and apparatus for generating exposure masks
HEIDENHAIN GMBH DR JOHANNES3 citations63
US4253020AFeb 24, 1981
Apparatus for measuring projectile velocity
HEIDENHAIN GMBH DR JOHANNES5 citations63
US5001340AMar 19, 1991
Angle measuring arrangement
HEIDENHAIN GMBH DR JOHANNES5 citations57