Inventor
YAMABE MASAKI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “YAMABE MASAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
4 patentsUS5430292AJul 4, 1995
Pattern inspection apparatus and electron beam apparatus
FUJITSU LTD152 citations98
US5557105ASep 17, 1996
Pattern inspection apparatus and electron beam apparatus
FUJITSU LTD150 citations97
US5400145AMar 21, 1995
Mark position detecting method and device for aligner and aligner having the device
FUJITSU LTD98 citations92
US4719645AJan 12, 1988
Rotary anode assembly for an X-ray source
FUJITSU LTD27 citations92