Inventor

KAWACHI SATOSHI

JP8 patents

⚠️ This page may combine multiple inventors who share the name “KAWACHI SATOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TEL SAGAMI LTD

3 patents

US5536918AJul 16, 1996

Heat treatment apparatus utilizing flat heating elements for treating semiconductor wafers

TEL SAGAMI LTD141 citations97

US5429498AJul 4, 1995

Heat treatment method and apparatus thereof

TEL SAGAMI LTD51 citations96

US5651670AJul 29, 1997

Heat treatment method and apparatus thereof

TEL SAGAMI LTD34 citations92

JGC CORP

2 patents

US5014631AMay 14, 1991

Cyclone furnace

JGC CORP21 citations77

US5000098AMar 19, 1991

Combustion apparatus

JGC CORP16 citations68

TOKYO ELECTRON TOHOKU KABUSHIK

1 patent

US5662469ASep 2, 1997

Heat treatment method

TOKYO ELECTRON TOHOKU KABUSHIK37 citations92

TOKYO ELECTRON LTD

1 patent

USD404369SJan 19, 1999

Manifold cover for use in a semiconductor wafer heat processing apparatus

TOKYO ELECTRON LTD17 citations91

HITACHI LTD

1 patent

US8005942B2Aug 23, 2011

Integrated presence management system, presence server and presence information management program

HITACHI LTD1 citations51