Inventor

ANDERSON III ROBERT L

US3 patents

⚠️ This page may combine multiple inventors who share the name “ANDERSON III ROBERT L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SPEEDFAM CORP

2 patents

US6001005ADec 14, 1999

Polishing apparatus

SPEEDFAM CORP18 citations88

US5957763ASep 28, 1999

Polishing apparatus with support columns supporting multiple platform members

SPEEDFAM CORP20 citations88

SPEEDFAM IPEC CORP

1 patent

US6113478ASep 5, 2000

Polishing apparatus with improved alignment of polishing plates

SPEEDFAM IPEC CORP20 citations87