Inventor
YOSHIOKA KATSUSHI
JP11 patents
Patents
11 patentsUS6893171B2May 17, 2005
Substrate treating apparatus
DAINIPPON SCREEN MFG131 citations98
US5762709AJun 9, 1998
Substrate spin coating apparatus
DAINIPPON SCREEN MFG76 citations96
US5677000AOct 14, 1997
Substrate spin treating method and apparatus
DAINIPPON SCREEN MFG62 citations96
US6558053B2May 6, 2003
Substrate processing apparatus
DAINIPPON SCREEN MFG63 citations95
US5376216ADec 27, 1994
Device for holding and rotating a substrate
DAINIPPON SCREEN MFG61 citations93
US6832863B2Dec 21, 2004
Substrate treating apparatus and method
DAINIPPON SCREEN MFG41 citations92
US6827782B2Dec 7, 2004
Chemical treating apparatus
DAINIPPON SCREEN MFG30 citations92
US6752543B2Jun 22, 2004
Substrate processing apparatus
DAINIPPON SCREEN MFG38 citations92
US6149727ANov 21, 2000
Substrate processing apparatus
DAINIPPON SCREEN MFG65 citations92
US5792259AAug 11, 1998
Substrate processing apparatus and air supply method in substrate processing apparatus
DAINIPPON SCREEN MFG21 citations92
US7105074B2Sep 12, 2006
Substrate treating method and apparatus
DAINIPPON SCREEN MFG5 citations62