Inventor
YAMADA AIRI
JP8 patents
⚠️ This page may combine multiple inventors who share the name “YAMADA AIRI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMITOMO CHEMICAL CO
7 patentsUS6828079B2Dec 7, 2004
Chemical amplification type positive resist composition
SUMITOMO CHEMICAL CO20 citations91
US7202010B2Apr 10, 2007
Chemical amplification type positive resist composition
SUMITOMO CHEMICAL CO19 citations83
US6569596B1May 27, 2003
Negative working chemical amplification type resist compositions
SUMITOMO CHEMICAL CO5 citations62
US7576223B2Aug 18, 2009
Chemical amplification type resist composition
SUMITOMO CHEMICAL CO2 citations61
US7160669B2Jan 9, 2007
Chemical amplification type resist composition
SUMITOMO CHEMICAL CO4 citations61
US7396899B2Jul 8, 2008
Chemical amplification type resist composition
SUMITOMO CHEMICAL CO0 citations51
US6689531B2Feb 10, 2004
Resist composition
SUMITOMO CHEMICAL CO0 citations39