P

Inventor

MAKITA YOSHINORI

JP6 patents
⚠️ This page may combine multiple inventors who share the name “MAKITA YOSHINORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

4 patents
US5696590ADec 9, 1997

Position control method position control apparatus, and semiconductor manufacturing apparatus

CANON KK26 citations89
US6809300B2Oct 26, 2004

Temperature adjusting system in exposure apparatus

CANON KK13 citations82
US4579453AApr 1, 1986

Method and apparatus for detecting a mark position

CANON KK22 citations79
US9257921B2Feb 9, 2016

Lithography apparatus and method of manufacturing article

CANON KK0 citations43

HITACHI GLOBAL STORAGE TECH

1 patent
US7657794B2Feb 2, 2010

Data storage device and error recovery method

HITACHI GLOBAL STORAGE TECH5 citations59

MAKITA YOSHINORI

1 patent
US8502958B2Aug 6, 2013

Positioning device, lithographic apparatus using same, and device manufacturing method

MAKITA YOSHINORI1 citations42