Inventor
SCHMIDT JOHN M
US10 patents
⚠️ This page may combine multiple inventors who share the name “SCHMIDT JOHN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
3 patentsUS7248062B1Jul 24, 2007
Contactless charge measurement of product wafers and control of corona generation and deposition
KLA TENCOR TECH CORP30 citations92
US7719294B1May 18, 2010
Systems configured to perform a non-contact method for determining a property of a specimen
KLA TENCOR TECH CORP10 citations83
US7538333B1May 26, 2009
Contactless charge measurement of product wafers and control of corona generation and deposition
KLA TENCOR TECH CORP3 citations62