Inventor

SUH SUNG-SOO

KR5 patents

⚠️ This page may combine multiple inventors who share the name “SUH SUNG-SOO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAMSUNG ELECTRONICS CO LTD

4 patents

US7900170B2Mar 1, 2011

System and method correcting optical proximity effect using pattern configuration dependent OPC models

SAMSUNG ELECTRONICS CO LTD7 citations82

US7475383B2Jan 6, 2009

Method of fabricating photo mask

SAMSUNG ELECTRONICS CO LTD16 citations81

US7940373B2May 10, 2011

Compensating masks, multi-optical systems using the masks, and methods of compensating for 3-D mask effect using the same

SAMSUNG ELECTRONICS CO LTD2 citations60

US11068635B2Jul 20, 2021

Method of designing a mask and method of manufacturing a semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD0 citations50

SUH SUNG-SOO

1 patent

US8563197B2Oct 22, 2013

Methods, apparatus and computer program products for fabricating masks and semiconductor devices using model-based optical proximity effect correction and lithography-friendly layout

SUH SUNG-SOO3 citations54