Inventor

TAKABA HIROYUKI

US9 patents

⚠️ This page may combine multiple inventors who share the name “TAKABA HIROYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAKABA HIROYUKI

3 patents

US8399366B1Mar 19, 2013

Method of depositing highly conformal amorphous carbon films over raised features

TAKABA HIROYUKI40 citations90

US8778810B2Jul 15, 2014

Plasma treatment method

TAKABA HIROYUKI2 citations58

US8962454B2Feb 24, 2015

Method of depositing dielectric films using microwave plasma

TAKABA HIROYUKI1 citations48

TOKYO ELECTRON LTD

2 patents

US9721803B2Aug 1, 2017

Etching method for substrate to be processed and plasma-etching device

TOKYO ELECTRON LTD2 citations70

US9293346B2Mar 22, 2016

Method for etching organic film and plasma etching device

TOKYO ELECTRON LTD2 citations60

FUKIAGE NORIAKI

1 patent

US8419859B2Apr 16, 2013

Method of cleaning plasma-treating apparatus, plasma-treating apparatus where the cleaning method is practiced, and memory medium memorizing program executing the cleaning method

FUKIAGE NORIAKI3 citations54

RENESAS ELECTRONICS CORP

1 patent

US7820503B2Oct 26, 2010

Semiconductor device and manufacturing method of the same

RENESAS ELECTRONICS CORP1 citations51

RENESAS TECH CORP

1 patent

US7511338B2Mar 31, 2009

Semiconductor device and manufacturing method of the same

RENESAS TECH CORP1 citations51

WINBOND ELECTRONICS CORP

1 patent

US11538900B1Dec 27, 2022

Semiconductor device and method of fabricating the same

WINBOND ELECTRONICS CORP0 citations49