Inventor
HIKAZUTANI KENICHI
JP8 patents
Patents
8 patentsUS5057187AOct 15, 1991
Ashing method for removing an organic film on a substance of a semiconductor device under fabrication
FUJITSU LTD61 citations95
US4983254AJan 8, 1991
Processing for stripping organic material
FUJITSU LTD62 citations95
US4961820AOct 9, 1990
Ashing method for removing an organic film on a substance of a semiconductor device under fabrication
FUJITSU LTD64 citations95
US5637528AJun 10, 1997
Semiconductor device manufacturing method including dry oxidation
FUJITSU LTD28 citations92
US4980022ADec 25, 1990
Method of removing a layer of organic matter
FUJITSU LTD42 citations92
US6709959B2Mar 23, 2004
Semiconductor device having a shallow junction and a fabrication process thereof
FUJITSU LTD5 citations60
US6187600B1Feb 13, 2001
Silicon substrate evaluation method and semiconductor device manufacturing method
FUJITSU LTD4 citations60
US7468297B2Dec 23, 2008
Method of manufacturing semiconductor device
FUJITSU LTD1 citations48