Inventor

TSUTSUMI MICHINARI

JP3 patents

Patents

3 patents

US5007984AApr 16, 1991

Method for etching chromium film formed on substrate

MITSUBISHI ELECTRIC CORP30 citations89

US4875434AOct 24, 1989

Apparatus for coating a substrate with a coating material

MITSUBISHI ELECTRIC CORP26 citations88

US5183533AFeb 2, 1993

Method for etching chromium film formed on substrate

MITSUBISHI ELECTRIC CORP6 citations60