Inventor
YADA TOSHIO
JP4 patents
⚠️ This page may combine multiple inventors who share the name “YADA TOSHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
3 patentsUS5007984AApr 16, 1991
Method for etching chromium film formed on substrate
MITSUBISHI ELECTRIC CORP30 citations89
US4875434AOct 24, 1989
Apparatus for coating a substrate with a coating material
MITSUBISHI ELECTRIC CORP26 citations88
US5183533AFeb 2, 1993
Method for etching chromium film formed on substrate
MITSUBISHI ELECTRIC CORP6 citations60