Inventor
LEE YEONGKWANG
KR5 patents
Patents
5 patentsUS10347468B2Jul 9, 2019
Plasma processing system, electron beam generator, and method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD5 citations69
US10522332B2Dec 31, 2019
Plasma processing system, electron beam generator, and method of fabricating semiconductor device
SAMSUNG ELECTRONICS CO LTD1 citations59
US12560532B2Feb 24, 2026
Apparatus for measuring radical density distribution based on light absorption and operating method thereof
SAMSUNG ELECTRONICS CO LTD0 citations57
US11289308B2Mar 29, 2022
Apparatus and method for processing substrate and method of manufacturing semiconductor device using the method
SAMSUNG ELECTRONICS CO LTD1 citations51
US10553401B2Feb 4, 2020
Antenna, microwave plasma source including the same, plasma processing apparatus, and method of manufacturing semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations46