Inventor
YAMAUCHI KUNIHIRO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “YAMAUCHI KUNIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CENTRAL GLASS CO LTD
6 patentsUS11335573B2May 17, 2022
Dry etching method and β-diketone-filled container
CENTRAL GLASS CO LTD4 citations72
US11618954B2Apr 4, 2023
Dry etching method, method for manufacturing semiconductor device, and etching device
CENTRAL GLASS CO LTD4 citations70
US10957554B2Mar 23, 2021
Etching method and etching device
CENTRAL GLASS CO LTD0 citations62
US11282714B2Mar 22, 2022
Etching method and etching device
CENTRAL GLASS CO LTD0 citations60
US12417922B2Sep 16, 2025
Surface treatment method, dry etching method, cleaning method, semiconductor device manufacturing method, and etching device
CENTRAL GLASS CO LTD0 citations56
US12308244B2May 20, 2025
Dry etching method, method for producing semiconductor device, and etching device
CENTRAL GLASS CO LTD0 citations56