Inventor
KANG NAMJUN
KR5 patents
Patents
5 patentsUS9378931B2Jun 28, 2016
Pulse plasma apparatus and drive method thereof
SAMSUNG ELECTRONICS CO LTD39 citations91
US11075088B2Jul 27, 2021
Method of plasma etching and method of fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD4 citations71
US11075089B2Jul 27, 2021
Method of plasma etching and method of fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD4 citations71
US10622217B2Apr 14, 2020
Method of plasma etching and method of fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD4 citations71
US9721762B2Aug 1, 2017
Method and system managing execution of preventative maintenance operation in semiconductor manufacturing equipment
SAMSUNG ELECTRONICS CO LTD0 citations36