Inventor
Choi Myungsun
KR8 patents
Patents
8 patentsUS11545341B2Jan 3, 2023
Plasma etching method and semiconductor device fabrication method including the same
SAMSUNG ELECTRONICS CO LTD4 citations71
US11075089B2Jul 27, 2021
Method of plasma etching and method of fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD4 citations71
US11075088B2Jul 27, 2021
Method of plasma etching and method of fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD4 citations71
US10622217B2Apr 14, 2020
Method of plasma etching and method of fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD4 citations71
US11398397B2Jul 26, 2022
Electrostatic chuck and plasma processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations60
US12020903B2Jun 25, 2024
Plasma etching method and semiconductor device fabrication method including the same
SAMSUNG ELECTRONICS CO LTD0 citations59
US12444589B2Oct 14, 2025
Operation method of etching apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations52
US11658039B2May 23, 2023
Plasma etching apparatus, plasma etching method, and semiconductor device fabrication method including the plasma etching method
SAMSUNG ELECTRONICS CO LTD0 citations47