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Inventor

CRABB RICHARD

US11 patents
⚠️ This page may combine multiple inventors who share the name “CRABB RICHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

EPSILON TECHN INC

5 patents
US5080549AJan 14, 1992

Wafer handling system with Bernoulli pick-up

EPSILON TECHN INC170 citations98
US4828224AMay 9, 1989

Chemical vapor deposition system

EPSILON TECHN INC557 citations98
US5020475AJun 4, 1991

Substrate handling and transporting apparatus

EPSILON TECHN INC64 citations96
US5156521AOct 20, 1992

Method for loading a substrate into a GVD apparatus

EPSILON TECHN INC30 citations92
US5092728AMar 3, 1992

Substrate loading apparatus for a CVD process

EPSILON TECHN INC51 citations92

ADVANCED SEMICONDUCTOR MAT

3 patents
US5997588ADec 7, 1999

Semiconductor processing system with gas curtain

ADVANCED SEMICONDUCTOR MAT664 citations97
US5435682AJul 25, 1995

Chemical vapor desposition system

ADVANCED SEMICONDUCTOR MAT74 citations96
US5324155AJun 28, 1994

Wafer handling system with bernoulli pick-up

ADVANCED SEMICONDUCTOR MAT105 citations96

ASM INC

3 patents
US6585478B1Jul 1, 2003

Semiconductor handling robot with improved paddle-type end effector

ASM INC18 citations92
US7235806B2Jun 26, 2007

Wafer edge with light sensor

ASM INC7 citations70
US7168911B1Jan 30, 2007

Semiconductor handling robot with improved paddle-type end effector

ASM INC5 citations62