Inventor
ROBINSON MCDONALD
US30 patents
⚠️ This page may combine multiple inventors who share the name “ROBINSON MCDONALD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EPSILON TECHN INC
8 patentsUS5221556AJun 22, 1993
Gas injectors for reaction chambers in CVD systems
EPSILON TECHN INC755 citations99
US4836138AJun 6, 1989
Heating system for reaction chamber of chemical vapor deposition equipment
EPSILON TECHN INC166 citations99
US5080549AJan 14, 1992
Wafer handling system with Bernoulli pick-up
EPSILON TECHN INC170 citations98
US4828224AMay 9, 1989
Chemical vapor deposition system
EPSILON TECHN INC557 citations98
US5020475AJun 4, 1991
Substrate handling and transporting apparatus
EPSILON TECHN INC64 citations96
US4975561ADec 4, 1990
Heating system for substrates
EPSILON TECHN INC98 citations96
US5156521AOct 20, 1992
Method for loading a substrate into a GVD apparatus
EPSILON TECHN INC30 citations92
US5092728AMar 3, 1992
Substrate loading apparatus for a CVD process
EPSILON TECHN INC51 citations92
ADVANCED SEMICONDUCTOR MAT
5 patentsUS5525157AJun 11, 1996
Gas injectors for reaction chambers in CVD systems
ADVANCED SEMICONDUCTOR MAT48 citations96
US5435682AJul 25, 1995
Chemical vapor desposition system
ADVANCED SEMICONDUCTOR MAT74 citations96
US5411590AMay 2, 1995
Gas injectors for reaction chambers in CVD systems
ADVANCED SEMICONDUCTOR MAT47 citations96
US5324155AJun 28, 1994
Wafer handling system with bernoulli pick-up
ADVANCED SEMICONDUCTOR MAT105 citations96
US5458918AOct 17, 1995
Gas injectors for reaction chambers in CVD systems
ADVANCED SEMICONDUCTOR MAT30 citations93
AT & T BELL LAB
5 patentsUS4616247AOct 7, 1986
P-I-N and avalanche photodiodes
AT & T BELL LAB73 citations96
US4497683AFeb 5, 1985
Process for producing dielectrically isolated silicon devices
AT & T BELL LAB119 citations96
US4461670AJul 24, 1984
Process for producing silicon devices
AT & T BELL LAB28 citations90
US4494303AJan 22, 1985
Method of making dielectrically isolated silicon devices
AT & T BELL LAB24 citations80
US4571818AFeb 25, 1986
Isolation process for high-voltage semiconductor devices
AT & T BELL LAB15 citations71