Inventor
HAWKINS MARK R
US33 patents
⚠️ This page may combine multiple inventors who share the name “HAWKINS MARK R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INC
11 patentsUS6692576B2Feb 17, 2004
Wafer support system
ASM INC552 citations98
US6343183B1Jan 29, 2002
Wafer support system
ASM INC87 citations98
US6113702ASep 5, 2000
Wafer support system
ASM INC93 citations98
US6093252AJul 25, 2000
Process chamber with inner support
ASM INC638 citations98
US6053982AApr 25, 2000
Wafer support system
ASM INC690 citations98
US6203622B1Mar 20, 2001
Wafer support system
ASM INC85 citations97
US6491757B2Dec 10, 2002
Wafer support system
ASM INC42 citations95
US6454866B1Sep 24, 2002
Wafer support system
ASM INC38 citations95
US6861321B2Mar 1, 2005
Method of loading a wafer onto a wafer holder to reduce thermal shock
ASM INC14 citations82
US7655093B2Feb 2, 2010
Wafer support system
ASM INC4 citations73
US7186298B2Mar 6, 2007
Wafer support system
ASM INC2 citations62
CATERPILLAR INC
10 patentsUS5469356ANov 21, 1995
System for controlling a vehicle to selectively allow operation in either an autonomous mode or a manual mode
CATERPILLAR INC178 citations99
US5925081AJul 20, 1999
System and method for managing access to a load resource having a loading machine
CATERPILLAR INC58 citations96
US5897595AApr 27, 1999
System and method for managing access of a fleet of mobile machines to a resource having multiple entry points
CATERPILLAR INC28 citations93
US5823295AOct 20, 1998
Lubrication control system for a work machine
CATERPILLAR INC63 citations93
US6131061AOct 10, 2000
Apparatus and method for preventing underdigging of a work machine
CATERPILLAR INC23 citations90
US5564274AOct 15, 1996
Cold oil protection circuit for a hydraulic system
CATERPILLAR INC25 citations90
US5511457AApr 30, 1996
Steering control system for an autonomous machine
CATERPILLAR INC21 citations90
US6032093AFeb 29, 2000
Apparatus and method for restricting implement movement of a work machine
CATERPILLAR INC49 citations88
US5467240ANov 14, 1995
Driver circuit with diagnostics and over voltage protection
CATERPILLAR INC13 citations73
US5450082ASep 12, 1995
Single multi-purpose input for different types of sensors with data edge conditioning circuit or ADC to provide digital output
CATERPILLAR INC7 citations71
EPSILON TECHN INC
5 patentsUS5221556AJun 22, 1993
Gas injectors for reaction chambers in CVD systems
EPSILON TECHN INC755 citations99
US4828224AMay 9, 1989
Chemical vapor deposition system
EPSILON TECHN INC557 citations98
US5020475AJun 4, 1991
Substrate handling and transporting apparatus
EPSILON TECHN INC64 citations96
US5156521AOct 20, 1992
Method for loading a substrate into a GVD apparatus
EPSILON TECHN INC30 citations92
US5092728AMar 3, 1992
Substrate loading apparatus for a CVD process
EPSILON TECHN INC51 citations92
ADVANCED SEMICONDUCTOR MAT
5 patentsUS5997588ADec 7, 1999
Semiconductor processing system with gas curtain
ADVANCED SEMICONDUCTOR MAT664 citations97
US5525157AJun 11, 1996
Gas injectors for reaction chambers in CVD systems
ADVANCED SEMICONDUCTOR MAT48 citations96
US5435682AJul 25, 1995
Chemical vapor desposition system
ADVANCED SEMICONDUCTOR MAT74 citations96
US5411590AMay 2, 1995
Gas injectors for reaction chambers in CVD systems
ADVANCED SEMICONDUCTOR MAT47 citations96
US5458918AOct 17, 1995
Gas injectors for reaction chambers in CVD systems
ADVANCED SEMICONDUCTOR MAT30 citations93