Inventor
GOODWIN DENNIS L
US18 patents
⚠️ This page may combine multiple inventors who share the name “GOODWIN DENNIS L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INC
8 patentsUS6293749B1Sep 25, 2001
Substrate transfer system for semiconductor processing equipment
ASM INC95 citations97
US6183183B1Feb 6, 2001
Dual arm linear hand-off wafer transfer assembly
ASM INC54 citations96
US7018479B2Mar 28, 2006
Rotating semiconductor processing apparatus
ASM INC33 citations92
US6554905B1Apr 29, 2003
Rotating semiconductor processing apparatus
ASM INC14 citations92
US6435809B2Aug 20, 2002
Dual arm linear hand-off wafer transfer assembly
ASM INC17 citations92
US6435799B2Aug 20, 2002
Wafer transfer arm stop
ASM INC13 citations82
US6394440B1May 28, 2002
Dual orientation leveling platform for semiconductor apparatus
ASM INC13 citations66
US6617247B2Sep 9, 2003
Method of processing a semiconductor wafer in a reaction chamber with a rotating component
ASM INC3 citations63
EPSILON TECHN INC
5 patentsUS5080549AJan 14, 1992
Wafer handling system with Bernoulli pick-up
EPSILON TECHN INC170 citations98
US4828224AMay 9, 1989
Chemical vapor deposition system
EPSILON TECHN INC557 citations98
US5020475AJun 4, 1991
Substrate handling and transporting apparatus
EPSILON TECHN INC64 citations96
US5156521AOct 20, 1992
Method for loading a substrate into a GVD apparatus
EPSILON TECHN INC30 citations92
US5092728AMar 3, 1992
Substrate loading apparatus for a CVD process
EPSILON TECHN INC51 citations92
ADVANCED SEMICONDUCTOR MAT
3 patentsUS5997588ADec 7, 1999
Semiconductor processing system with gas curtain
ADVANCED SEMICONDUCTOR MAT664 citations97
US5435682AJul 25, 1995
Chemical vapor desposition system
ADVANCED SEMICONDUCTOR MAT74 citations96
US5324155AJun 28, 1994
Wafer handling system with bernoulli pick-up
ADVANCED SEMICONDUCTOR MAT105 citations96