Inventor

CHO HAHYEON

KR3 patents

Patents

3 patents

US12529951B2Jan 20, 2026

Laminate for blank mask and manufacturing method for the same

SK ENPULSE CO LTD0 citations52

US12487517B2Dec 2, 2025

Blank mask and photomask using the same

SK ENPULSE CO LTD0 citations48

US12461439B2Nov 4, 2025

Blank mask and photomask using the same

SK ENPULSE CO LTD0 citations48