Inventor
NEMOTO ISAO
13 patents
⚠️ This page may combine multiple inventors who share the name “NEMOTO ISAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS6160615ADec 12, 2000
Surface measurement apparatus for detecting crystal defects of wafer
HITACHI LTD35 citations92
US6108079AAug 22, 2000
Method for measuring crystal defect and equipment using the same
HITACHI LTD30 citations92
US4352561AOct 5, 1982
Calibrating apparatus in a monochromator
HITACHI LTD12 citations71
US4304490ADec 8, 1981
Spectrophotometer
HITACHI LTD17 citations71