Inventor
POWELL RONALD A
US25 patents
⚠️ This page may combine multiple inventors who share the name “POWELL RONALD A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
10 patentsUS6464779B1Oct 15, 2002
Copper atomic layer chemical vapor desposition
NOVELLUS SYSTEMS INC195 citations99
US6790773B1Sep 14, 2004
Process for forming barrier/seed structures for integrated circuits
NOVELLUS SYSTEMS INC132 citations97
US6709557B1Mar 23, 2004
Sputter apparatus for producing multi-component metal alloy films and method for making the same
NOVELLUS SYSTEMS INC87 citations97
US6589887B1Jul 8, 2003
Forming metal-derived layers by simultaneous deposition and evaporation of metal
NOVELLUS SYSTEMS INC75 citations97
US6541374B1Apr 1, 2003
Method of depositing a diffusion barrier for copper interconnection applications
NOVELLUS SYSTEMS INC85 citations96
US6319842B1Nov 20, 2001
Method of cleansing vias in semiconductor wafer having metal conductive layer
NOVELLUS SYSTEMS INC56 citations93
US6525829B1Feb 25, 2003
Method and apparatus for in-situ measurement of thickness of copper oxide film using optical reflectivity
NOVELLUS SYSTEMS INC51 citations92
US6607982B1Aug 19, 2003
High magnesium content copper magnesium alloys as diffusion barriers
NOVELLUS SYSTEMS INC51 citations90
US8053861B2Nov 8, 2011
Diffusion barrier layers
NOVELLUS SYSTEMS INC12 citations84
US10115608B2Oct 30, 2018
Method and apparatus for rapid pump-down of a high-vacuum loadlock
NOVELLUS SYSTEMS INC0 citations32
VIEW INC
8 patentsUS9829763B2Nov 28, 2017
Multi-pane electrochromic windows
VIEW INC30 citations98
US9638977B2May 2, 2017
Pinhole mitigation for optical devices
VIEW INC12 citations93
US10534237B2Jan 14, 2020
Pinhole mitigation for optical devices
VIEW INC6 citations84
US11550197B2Jan 10, 2023
Pinhole mitigation for optical devices
VIEW INC2 citations73
US10890820B2Jan 12, 2021
Multi-pane electrochromic windows
VIEW INC1 citations73
US10088731B2Oct 2, 2018
Multi-pane electrochromic windows
VIEW INC2 citations73
US11724964B2Aug 15, 2023
Multi-pane electrochromic windows
VIEW INC0 citations62
US12298642B2May 13, 2025
Pinhole mitigation for optical devices
VIEW INC0 citations60
VARIAN ASSOCIATES
5 patentsUS4807994AFeb 28, 1989
Method of mapping ion implant dose uniformity
VARIAN ASSOCIATES62 citations94
US4661177AApr 28, 1987
Method for doping semiconductor wafers by rapid thermal processing of solid planar diffusion sources
VARIAN ASSOCIATES34 citations92
US5118200AJun 2, 1992
Method and apparatus for temperature measurements
VARIAN ASSOCIATES77 citations91
US4764026AAug 16, 1988
Semiconductor wafer temperature measuring device and method
VARIAN ASSOCIATES47 citations91
US4522845AJun 11, 1985
Process for producing a layer of a metal silicide by applying multichromatic radiation
VARIAN ASSOCIATES21 citations81